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Pneumatically Driven Linear Vacuum Feedthrough

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Picture of a pneumatically driven linear vacuum feedthrough

Drawing of a pneumatically driven linear vacuum feedthrough


(Please click the pictures to enlarge)

Typ: PALDV-03-120

- Applicable for the use in ultra high vacuum
- Approx. 200 ms cycle time
- Freely adjustable end position damper
- Sample holder configurable to customer’s requirement
- Bakeable up to 80° C (with detached pneumatic cylinder)
- Ready to mount with CF40 flange
- Suitable for rapid and reproducible shading of deposition sources

Video: Application Principle
Picture: Application Principles of the UHV linear feedthrough

Pneumatically Driven Linear Vacuum Feedthrough - Datasheet
Pneumatically Driven Linear Vacuum Feedthrough - Manual
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