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Controlling of TSPs
with up to 4 filaments
Titanium Sublimation Pump
- Mounting flange: DN35CF
- 3 filaments
LN2 Cryo Shroud for TSP
- Mounting Flange: DN150CF
- TSP Flange: DN35CF
TSP Ambient Sputter Shield
- Mounting flange: DN150CF
- TSP flange: DN35CF
SUBLI-CON 51 - Power Supply for TSP
- Controlling of TSPs with up to 4 filaments
- Filaments bakeable
- Manual input function
- Intern timing
- Interlock and remote control
- Automatic or manual filament selection
- 19” rack installation, 2 HU
 Data Sheet - SUBI-CON 51
Catalogue-Chapter: Ion Getter Pumps
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