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Instrumentation / Power and High Voltage Feedthroughs
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Power and high voltage feedthroughs are designed to carry high voltage
and/or high current in many vacuum processes. Power feedthroughs are
offered in a wide design range to match the requirements of different
applications.
The atmosphere-side ceramic surface is mostly covered with high temperature
glass coating in order to reduce surface contamination and to increase the
creep resistance.
We also offer a choice of liquid-cooled power and voltage
feedthroughs. Liquid-cooled feedthroughs are typically used with grounded,
closed cooling systems and non-conductive coolants such as deionized water
or ethylene glycol.
Standard Specifications
 Voltages to 100 kV
 Current to 1000 A
 Temperature range: -269°C to 450°C
 Internal pressure 1.33 x 10-10 mbar to 200 bar
Standard connections
 Weld (without flange)
 KF flange
 CF flange
 Custom connections on request
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