VACOM’s gate valves are suitable for both high and ultra high vacuum applications. They have a very small
installation length with maximum conductance and are primarily used as stop valves for pumping or sluice systems.
Our standard gate valves of the American manufacturer HVA have a circular flow passage and a drive with linear
feedthrough.
High vacuum and ultra high vacuum valves are available, depending on application. Housings and valve seats of
high-vacuum valves are FKM-sealed whereas metal seals are used in valves intended for UHV applications. The
drives are manually or electropneumatically actuated and the linear feedthroughs are bellows-sealed.
In addition to standard valves VACOM also offers rectangle gate valves of the Japanese manufacturer SMC. These
were specifically designed for demanding applications of the semiconductor industry and in development and
research. These valves are offered in different styles: with cassette housing or a rectangular door.
Special gate valves, such as 3-position gate valves or control gate valves are available on request.
