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Residual Gas Analysis, Mass Spectrum Analysis
 Catalogue Chapter as pdf-file 
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VACOM has an own RGA service area.
We offer:
 Qualified outgassing measurement -
quantitative and qualitative residual gas analysis
RGA measurement up to 2 x 10-14 mbar partial pressure
and a mass number of 200 amu
Characterisation of the outgassing behaviour of vacuum
components - from small probes to vacuum chambers
Residual gas analysis also in combination with probe heating
Detection of pressure increase in vacuum systems
Residual gas analysis and leak detection also in situ at the
customer’s vacuum system
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