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Vacuum Traps, Filters & Oil Mist Separators
 Catalogue Chapter as pdf-file
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Vacuum traps protect oil sealed and dry running pumps used within reactive processes (e. g. TEOS, NITRIDE, LTO, HTO, PLASMA). It filters corrosive and during the driving process emitted particles, which would contaminate the vacuum pump, and therefore shortens the downtime or respectively lengthens the maintenance intervals.
See the Chapter introduction for detailed information.
Bildergalerie (Bitte klicken Sie zum Vergrößern auf das jeweilige Bild)
Adsorption Traps
- KF Adsorption traps including heater
- Visi-Trap (simple Adsorption trap with plastic housing)
- LN2 Cooling Traps
Single-Stage Vacuum Traps
- 4"-type with one filter element and the KF flange DN25
- 8"-with four filter elements and KF flanges DN40 or DN50
- Snap closing allows a simple filter element exchange
Multi-Stage Vacuum Traps
- Five standardised models of different sizes are available
- Large selection of filter elements (Cartridges for all Traps)
- Delivery of customized filter elements as required is possible
Oil Mist Separators
- HCOME 4 with one filter element for pumps with a direct fitting up to
DN40KF
- HCOME 8 with three filter elements for pumps with a direct fitting up to
DN50KF
- MAXI-HCOME with five parallel filter elements for pumps with a direct
fitting up to DN50KF
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