| Material |
NBR (nitrile butadiene rubber) |
FKM (fluor rubber) |
PFPM (perfluor rubber) |
PTFE (polytetrafluorethylene) |
| Flange system |
KF, ISO |
KF,ISO, CF |
KF, ISO |
KF |
| Design |
O-ring |
O-ring or flat seal |
O-ring |
edge seal |
| Applicaton |
non corrosive |
moderate corrosive |
highly corrosive |
highly corrosive |
| Comment |
standard material for KF and ISO |
standard material for KF and ISO |
application mainly in semiconductor technology |
high pressing forces, clamp chains or special clamps |
| Material |
Aluminium |
Copper (OFHC) |
| Flange system |
KF, ISO |
CF |
| Design |
edge seal |
flat gasket |
| Application |
up to ultimate pressure 1.0E-7 mbar |
up to ultimate pressure, radiation resistant |
| Comment |
high pressing forces, for KF with clamp chainsor special clamps usable |
standard material for CF, for special applications silver coated or annealed |