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General technical information - Sealing materials

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Sealing materials
Different sealing materials are used in vacuum applications. The selection of the appropriate material depends on the re q u i re d characteristics, especially with respect to:

 Ultimate pressure
 Temperature
 Chemical resistance
 Radiation resistance

O-rings of NBR or FKM are commonly used for KF and ISO components. Flat seals of copper are standard for CF components. Other materials are also used for special applications.



Elastomer seals

Material NBR
(nitrile butadiene rubber)
FKM
(fluor rubber)
PFPM
(perfluor rubber)
PTFE
(polytetrafluorethylene)
Flange system KF, ISO KF,ISO, CF KF, ISO KF
Design O-ring O-ring or
flat seal
O-ring edge seal
Applicaton non corrosive moderate corrosive highly corrosive highly corrosive
Comment standard material
for KF and ISO
standard material
for KF and ISO
application mainly in
semiconductor
technology
high pressing forces,
clamp chains or special
clamps


Metal seals

Material Aluminium Copper (OFHC)
Flange system KF, ISO CF
Design edge seal flat gasket
Application up to ultimate pressure 1.0E-7 mbar up to ultimate pressure,
radiation resistant
Comment high pressing forces, for KF with clamp
chainsor special clamps usable
standard material for CF, for special
applications silver coated or annealed

General technical information as pdf-file



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